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Conferences > LAC > 2022 > LM2B > LM2B.1

Reduction of process-induced Waviness in Laser Polishing of Fused Silica by a Thermography-base Process Control

Manuel Jung, Sai M. D. Kukkala, and Edgar Willenborg

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Abstract

A thermography-based approach for process control in laser polishing of fused silica is presented and compared with state-of-the-art pyrometer-based approaches. Furthermore, influences of laser power fluctuation on the formation of waviness are investigated.

© 2022 The Author(s)

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