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Deposition of Metal Lines Using an Excimer Laser

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Abstract

A laser-induced forward transfer (LIFT) technique for transferring metal from one substrate to another has recently been reported.1 With this method, a metal film, deposited on a transparent source substrate, is irradiated by the laser which is focused at the interface between the film and substrate, Fig. 1, so that the ablated metal is expelled outward and will deposit on a target substrate located near the source. As noted previously,1 properties of the deposited metal features such as resolution, i.e., similarity of the deposited to the ablated metal region, electrical conductivity, etc., depend on a number of parameters including laser power density, film thickness, source target distance, etc.

© 1987 Optical Society of America

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