Abstract

Surfaces can be structured by exposure to intense uv laser light¹. A wide variety of materials with different penetration depths for uv laser light and different chemical constitution show for certain fluence ranges high removal rates on the order of micrometers per pulse, along with little or no thermal damage to the edges. Thus the surfaces of many solids have been patterned with a resolution down to less than one micrometer².

© 1989 Optical Society of America