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Conferences > MSBIP > 1991 > WC > WC7

Scanning Scattering Microscope: A Novel Optical Technique for Imaging Surface Microtopography

Denes Marton and Joseph Fine

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Abstract

The Scanning Scattering Microscope (SSM) [1] can produce two-dimensional, high resolution micrographs of very small surface features and surface microtopography; this optical technique is very sensitive to surface roughness, surface and near-surface damage, and individual surface defects. Its present lateral resolution of about 5 μm is augmented by an extremely high sensitivity to surface roughness of about 2 nm.

© 1991 Optical Society of America

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