A Study of Structural Properties of Non-stoichiometric Zinc Oxide Films Deposited by e-Beam Evaporation Technique

Rui-yu Chen; Chang-sheng Yuan; Qi-he Wang

doi:10.1364/MSBIP.1991.WC6

Microphysics of Surfaces: Beam-Induced Processes
Technical Digest Series (Optica Publishing Group, 1991),
paper WC6
•https://doi.org/10.1364/MSBIP.1991.WC6

A Study of Structural Properties of Non-stoichiometric Zinc Oxide Films Deposited by e-Beam Evaporation Technique

Rui-yu Chen, Chang-sheng Yuan, and Qi-he Wang

The Microphysics of Surfaces: Beam-Induced Processes 1991

Santa Fe, New Mexico United States
11–13 February 1991
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R. Chen, C. Yuan, and Q. Wang, "A Study of Structural Properties of Non-stoichiometric Zinc Oxide Films Deposited by e-Beam Evaporation Technique," in Microphysics of Surfaces: Beam-Induced Processes, Technical Digest Series (Optica Publishing Group, 1991), paper WC6.

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Abstract

In this paper, we discuss the effects of various temperatures of substrates and annealings on the structural properties of non-stoichiometric zinc oxide films.

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