Non-linear optical lithography for the fabrication of 3D photonic crystals and optical devices

Jesper Serbin; Boris N. Chichkov

doi:10.1364/NLO.2004.WB6

Nonlinear Optics: Materials, Fundamentals and Applications
Technical Digest (CD) (Optica Publishing Group, 2004),
paper WB6
•https://doi.org/10.1364/NLO.2004.WB6

Non-linear optical lithography for the fabrication of 3D photonic crystals and optical devices

Jesper Serbin and Boris N. Chichkov

Nonlinear Optics: Materials, Fundamentals and Applications 2004

Waikoloa, Hawaii United States
ISBN: 1-55752-773-3

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J. Serbin and B. N. Chichkov, "Non-linear optical lithography for the fabrication of 3D photonic crystals and optical devices," in Nonlinear Optics: Materials, Fundamentals and Applications, Technical Digest (CD) (Optica Publishing Group, 2004), paper WB6.

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Abstract

Non-linear optical lithography for the fabrication of 3D nanostructures will be presented. Characterization of photonic crystals fabricated by this technique in different photosensitive polymers as well as their infiltrated replicas will be reported.

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