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Design of High-efficiency Visible-Spectrum SiN Grating Coupler Based on Amorphous Silicon Overlay

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Abstract

Design of high-efficiency visible-spectrum silicon nitride grating couplers, compatible with CMOS fabrication are proposed. The design is based on amorphous-silicon overlay and distributed-Bragg-reflectors. We simulated 74% and 79% efficiency for 638 nm and 780 nm.

© 2022 The Author(s)

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Poster Presentation

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