Abstract

A diffraction-limited imaging system employing a high-contrast detection system, e.g., a microlithographic system, is mathematically equivalent to a bandlimiter followed by a hardlimiter. The output of that system is a binary image. In the 1-D case it is a series of parallel lines. Is it possible to construct at the output of that system a finite number of lines of arbitrary locations and widths, even exceeding the resolution of the system (as determined by its bandwidth)? We show that if one is only interested in a region D of finite extent within which the lines lie (i.e., one disregards what the image does outside D), the answer is always affirmative.

© 1985 Optical Society of America