Abstract

Analysis shows that the interference pattern of two diffracted orders of a zone plate is another zone plate pattern. The smallest spacing of the interference pattern can be several times smaller than that of the parent and thus corresponding improvement in spatial resolution can be gained. The demonstration of the scheme using a visible light laser and studies with a soft x-ray source lead us to think that fabricating zone plates with spatial resolution as small as 200 Å may be possible.

© 1986 Optical Society of America