Abstract

A new deformable membrane mirror (DM²) was simulated, designed, and constructed using contemporary membrane materials. The resulting prototype was characterized and the results compared favorably with simulation. A 2-D model of mirror dynamic response was defined and evaluated both by analysis and numerical simulation. The model incorporated mirror tension, mass, geometry, and the effects of damping due to the surrounding medium. Finite boundary conditions were considered. The analytical results were compared to the corresponding numerical cases and found to agree within the grid resolution of the simulation. Detailed design of the DM² was performed, and a prototype fabricated using a 4-in. diam chrome coated Mylar pellicle suspended in a precision-lapped Macor frame between a 16 × 16 array of electrodes and a window with a transparent electrode. The membrane cavity was at atmospheric pressure.

© 1988 Optical Society of America