Abstract

Fresnel zone plate lenses with outer zone widths of 40 nm have been used to image various nanostructure patterns with a spatial resolution approaching 50 nm (0.05 µm). Radiation at 4.5-nm wavelength was utilized at the BESSY synchrotron facility in Berlin using the Gottingen x-ray microscope.¹² The test patterns include periodic line structures, circular structures, and various patterns associated with a 0.1-µm test circuit. Feature sizes of the test patterns are well resolved at 60 nm.

© 1988 Optical Society of America