Abstract

Excimer laser ablation was used to prepare thin films from bulk high-T_c material. In previous studies we investigated the systematics of the ablation process by monitoring the thickness and composition of the thin films produced as a function of laser fluence and deposition angle. These studies indicate that material is primarily ejected from the target surface in a highly collimated plume. We have enhanced our studies by adding a fluorescence monitor and a dc biased rf oxygen plasma to our apparatus with which we have studied the fluorescence spectra of the plume at various positions within the plume. The results of this investigation are presented together with our latest results associated with high-T_c film preparation.

© 1988 Optical Society of America