Abstract

Single layers of hafnia, alumina, and silica on quartz substrates were deposited by reactive ion plating and ion beam sputtering. Refractive indices and extinction coefficients were determined by spectrophotometric analysis and related to the process parameters. Water adsorption was examined with the aid of optical transmission in the range from 2 to 4 µm. Laser-induced damage testing was performed by a KrF excimer laser at 248 nm. The tested samples were quarterwave stacks of Al₂O₃/SiO₂ and HfO₂/SiO₂ on silica substrates. All the results are compared and related to the properties of conventional evaported coatings.

© 1989 Optical Society of America