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Fundamental limits of VLSI liquid-crystal spatial light modulators

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Abstract

A new class of spatial light modulator based on very-large-scale integration (VLSI) semiconductor/liquid-crystal technology has been developed. Devices in this class consist of a liquid-crystal modulator atop an active semiconductor backplane.1,2 The liquid-crystal modulator may consist of combinations of photodetectors, analog/digital electronics, and metal pads on the semiconductor backplane. The liquid-crystal material is sandwiched between the semiconductor backplane and a sheet of glass coated with a transparent conductor. Optically or electronically addressed devices can be, fabricated depending upon the design of the semiconductor backplane. In this manner, it is possible to design special-purpose, well-integrated spatial light modulators that perform specific functions in optoelectronic computing architectures.

© 1990 Optical Society of America

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