Abstract

The surface-structure characterization our team has developed for several years (based on microdensitometer analysis of shadowed surface replicas) makes it possible to determine the statistical parameters that describe any rough surface. However, this method is particularly devoted to microroughness studies because of its very high resolution and the small size of the studied samples. Therefore, it is sometimes difficult to compare the results obtained this way with those given by more conventional techniques (such as profilometry). After the relief of a silver thin film was restored and its roughness parameters were determined, it was possible to simulate, from this relief, some profiles that, depending on the stylus size, could be obtained when using a profilometer. Results concerning the statistical roughness parameters of the profiles obtained this way are compared with those deduced from the microdensitometer method. Moreover, by simulation of an optical method, other results are available that are connected with the relief deduced from the reconstructed one. Hence, it is possible to explain the discrepancies between results related to the same sample and obtained by these three methods.

© 1990 Optical Society of America