Abstract

The deformable mirror, a monolithically integrated, silicon-based array of individually electronically addressable micromechanical mirror elements that move by means of electrostatic deflection, is an important class of spatial light modulator (SLM). A particularly promising version of this type of SLM is the deformable-mirror device (DMD).¹ A sensitive, fast, high-resolution, and calibratable method of DMD element characterization uses optical-beam deflection (OBD) to measure surface displacement,² which is well-suited to the characterization of whole-pixel motion and the imaging of pixel surface displacement with a spatial resolution of a few microns. Calibration of displacement, probebeam position, measurement of the deflection signal, and construction of amplitude and phase images are accomplished under computer control. Experimental results will be presented and compared with nonlinear theoretical models of the DMD.

© 1990 Optical Society of America