Abstract

Rapid quenching during sputtering makes it possible to achieve glass films with compositions not obtainable in the bulk by normal batch melting. Virtually all previously reported studies have used Corning 7059 glass and SiO₂. We report the first investigation of sputtering multicomponent oxide glasses that contain large mole fractions of modifier components. A titanium borosilicate glass, originally developed for all-optical switching in diffused waveguides,¹ was modified for this work: 40 mol% SiO₂, 20 TiO₂, 20 B₂O₃, 20 K₂O. Linear optical properties were characterized (n_d = 1.7184, v_d = 27.65,αd = 0.5 cm^-1). The intensity-dependent refractive-index coefficient was measured with a Mach–Zehnder interferometer and a Q-switched, mode-locked Nd :glass laser [n₂ = (1.38 ± 0.81) × 10⁻15 cm²/W]. High-quality waveguiding films were achieved and were fully characterized. The films have high refractive indices (1.66 < n_d < 1.83) and excellent transparency. Film composition and stoichiometry were checked with SIMS and ESCA. In-plane and out-of-plane optical scattering losses were measured. Thermal anneals were found to reduce scattering losses significantly. The films have excellent mechanical properties and chemical durability and were able to withstand repeated optical pulses of an average intensity of 10 GW/cm² without visible signs of damage.

© 1990 Optical Society of America