Abstract

Reduction of optical scattering is becoming a concern in space and astronomy. In earlier work we have shown that using ion beam processes greatly influenced the microstructure of metal coatings. This paper reports results concerning the ion beam deposition of gold and platinum onto superpolished fused silica and zerodure substrates. Coating processes employed are evaporation, ion-assisted deposition, sputtering, and ion beam sputtering. Coatings have been examined using optical scatterometer, optical profilometer, stylus profilometer, and scanning tunneling microscopy. Results indicate a significant decrease in the microroughness of coatings deposited using ion beam processes.

© 1991 Optical Society of America