Abstract

Thin metal coatings play an important role in many optical microelectronic applications. Metal coatings are used as wideband high reflection surfaces for astronomic and laser applications. Unfortunately metal coatings, especially silver, suffer from poor resistance to moisture. Effects of ion bombardment on the environmental durability of metal coatings are examined. Thin films of silver, aluminum, and gold were deposited on glass substrates. Coatings were deposited using conventional evaporation, sputtering, and ion assisted deposition (IAD). Samples bombarded with low energy (300-eV) argon ions showed significant improvements in resistance to moisture, adhesion, and abrasion. The addition of a thin underlayer of metallic (chromium) or dielectric (aluminum oxide) coatings had a significant improvement on the durability of metal coatings.

© 1989 Optical Society of America