Abstract

Deposition error compensation involves the detection of either thickness or optical constant errors in a layer after its deposition and the reoptimization of the remaining layers in the system to recover the originally specified optical performance. This process allows complicated optical multilayer coatings to be deposited with high yields. The theoretical aspects of the deposition error compensation algorithm were given and simulations of an edge filter with three different deposition systems were described in a companion paper.¹ In this work the error compensation program has been interfaced to a wideband optical monitor and an automated magnetron sputtering system. Multilayer coatings can be deposited automatically, with transmittance measurements being performed after each layer to determine the actual thickness deposited. A provision to reduce thickness errors is also available by first depositing 95% of each layer and then determining the layer thickness to accurately determine the rate for the remainder of the layer.

© 1991 Optical Society of America