Abstract

Complex optical multilayer (non-quarterwave) coatings can be difficult to manufacture on a routine basis because of problems with the control of the layer thicknesses or the optical constants of materials. The challenge is to achieve very accurate control over a large number of layers in order to realize the desired optical performance. The solution lies in detecting and then compensating for any errors in a layer thickness or in the expected optical constants.¹

© 1992 Optical Society of America