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Thin film coatings on silicon detectors for stationary reflection properties at oblique incidence

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Abstract

Transparent single-layer and double-layer coatings are designed that render the reflectance (Rp, Rs) or ellipsometric (Ψ, Δ) parameters of a Si detector surface locally stationary with respect to small changes of the angle of incidence in the neighborhood of a given angle and at a fixed wavelength. All reflection parameters are made stationary with a triple-layer coating. Solutions are obtained, by using the Newton-Raphson method, for the refractive index and the thickness of the single layer and for the thicknesses of the constituent films of the double and triple layers whose refractive indices are preselected. These coatings are applied to reduce the sensitivity of the instrument matrix of the four-detector photopolarimeter1 with respect to small changes in the direction of arrival of the incident light beam whose Stokes parameters are to be measured.

© 1992 Optical Society of America

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