Abstract

One of the factors determining the diffraction efficiency of the grating of a surface-relief hologram is the refractive index of the material. The refractive index of the photopoly­mer constituting a reproduced grating is smaller than that of the photoresist constituting the master grating. To reproduce the grating with a high diffraction efficiency, we studied how to optimize the grating shape. We found that a grating 0.5 μm wide required a master grating 0.9 μm wide to get the highest diffraction efficiency and that the reproduced grating had to be at least 1 μm deep. We fabricated a master and stamp and replicated gratings with a diffraction efficiency of 78 ±5%.

© 1992 Optical Society of America