Abstract

The use of an ion beam to create localized regions of higher refractive index presents the possibility of making planar integrated optic lenses and correcting the chromatic aberrations of holographic gratings. We have studied the use of ZrF_xO_y for these applications. Thin film waveguides of zirconium oxyfluoride were deposited by using thermal evaporation of zirconium fluoride with concurrent oxygen bombardment. The index of refraction of the films increases from ~1.5 to 1.9 with increasing levels of bombardment; somewhat increased waveguide losses are also observed. Localized regions with higher index and a planar surface have been made.

© 1992 Optical Society of America