Optical in-situ monitoring techniques for optical and semiconductor coatings

Haluk Sankur

doi:10.1364/OAM.1993.WBB.2

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Conferences > OAM > 1993 > WBB > WBB.2

OSA Annual Meeting
Technical Digest Series (Optica Publishing Group, 1993),
paper WBB.2
•https://doi.org/10.1364/OAM.1993.WBB.2

Optical in-situ monitoring techniques for optical and semiconductor coatings

Haluk Sankur

Author Information

Author Affiliations

Haluk Sankur

Rockwell International Corp.

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H Sankur

OSA Annual Meeting 1993

Toronto Canada
3–8 October 1993
ISBN:

From the session
Symposium on Real-Time Control of Thin-Film Deposition: 1 (WBB)

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H. Sankur, "Optical in-situ monitoring techniques for optical and semiconductor coatings," in OSA Annual Meeting, Technical Digest Series (Optica Publishing Group, 1993), paper WBB.2.

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- Optical coatings