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Micro lens fabrication by means of femtosecond two photon photopolymerization

Rui Guo, Shizhou Xiao, Xiaomin Zhai, Jiawen Li, Andong Xia, and Wenhao Huang

Open Access Open Access

Abstract

We report the fabrication of micro lens using an alternative annular scanning mode with continuous variable layer thickness by two-photon polymerization after multi-parameter optimization. Laser scanning mode and scanning pace parameter are optimized to achieve good appearance. As examples of the results, a 2 × 2 micro spherical lens array with diameter of 15 μm and a micro Fresnel lens with diameter of 17 μm are fabricated. Their optical performances are also tested. Compared to the conventional femtosecond two-photon fabrication, this work provides an alternative, effective and cheap processing method for the fabrication of micro optic device that requires arbitrary shape with high surface quality and small scale.

©2006 Optical Society of America

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Figures (5)
Fig. 1
Fig. 1 The diagram of the evaluation system for micro lens optical performance.

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Fig. 2.
Fig. 2. Simulations of microfabrication scanning method effects on micro lens surface quality: (a) parallel linear scanning method with fixed constant Delta Z, (b) annular scanning method with a fixed constant Delta Z, (c) annular scanning method with a dynamical Zi , where Zi =[R 2-(i·lx)2]1/2.

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Fig. 3.
Fig. 3. The correlation of the lateral scanning step (lx) effect with the surface roughness (Ra), The data are gotten by 50× WYKO NT1000 (Veeco Metrology Group).

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Fig. 4.
Fig. 4. Scanning electron microscope images of micro lens fabricated with optimized parameters: (a), (b) 2×2 array micro spherical lens and its close-up view. (c) The curve indicates the alternation of Delta Z according to layer number i. (d-g) micro Fresnel lens fabricated with different lateral scanning step: 100 nm, 200 nm, 300 nm and 400 nm, respectively. For each Fresnel lens, the thickness is 2μm, and the diameter is 17 μm. The refractive index is 1.53. The number of zones is 3 and their radiuses are 5.0 μm, 7.1 μm and 8.7 μm, respectively.

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Fig. 5.
Fig. 5. The optical performance of micro lens: (a) the simulated and experimental focus intensity distribution of the micro spherical lens, the focus length is detected about 60 μm (b) The simulated and experimental diffractive intensity distribution of micro Fresnel lens, the detected image was obtained at a distance of 350 μm away from the lens, (c) and (d) are the detection of micro Fresnel lens imaging ability, (c) the real ghost image of “USTC”, detected at about 250 μm behind the Fresnel lens, (d) the spurious ghost image of “USTC”, detected at about 200 μm before the Fresnel lens.

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Equations (4)

Equations on this page are rendered with MathJax. Learn more.

E ( x , y ) = − i λz ∬ s E ( x 0 , y 0 ) exp ⁡ { ikz [ 1 + ( x − x 0 ) 2 ( y − y 0 ) 2 2 z 2 ] } dx 0 dy 0
E ( x 0 , y 0 ) = E in · H lens ( x 0 , y 0 ) = E in · A lens · exp ⁡ ( i φ lens )
φ spherical ( r ) = k 0 · ( R 2 − r 2 ) 1 2
φ fresnel ( r ) = k 0 ( f − ( f 2 + r 2 ) 1 2 )
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