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  • First Optoelectronics and Communications Conference
  • Technical Digest Series (Optica Publishing Group, 1996),
  • paper 19A2.4

Fabrication of High Density Reflection-type S-SEED Array by MOVPE

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Abstract

A 2 K-bit array of reflection type symmetric self electro-optic effect device(S-SEED) grown by LP-MOVPE, with the window size 20μmx40μm, has been fabricated. Polyimide planarization method was employed and measurements showed 42% change of photo-current with 4.5 nW incident beam.

© 1996 IEICE

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