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A Comparison of Approaches for Ultra-Low-Loss Waveguides

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We compare ultra-low-loss silica waveguides with PECVD SiO2, borophosphosilicate glass (BPSG), and wafer-bonded thermal oxide upper claddings. We demonstrate fiber-like (0.045 dB/m) total propagation loss in planar waveguides with bonded thermal oxide upper claddings.

© 2012 Optical Society of America

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