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CMOS-Foundry Compatible, Broadband, and Compact Routing of Multimode SOI Waveguides

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Abstract

We demonstrate a CMOS-foundry compatible, broadband, and compact platform for routing multimode wavguides. Insertion loss of <0.5dB and modal cross-talk of <-15dB are measured for 90° and 180° Reff < 3µm bends supporting over 200nm of bandwidth.

© 2023 The Author(s)

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