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Conferences > OFC > 2023 > M4I > M4I.2

Passive Integrated Athermal (De) Multiplexers on 300 mm Silicon Photonics Wafers

Yun Gao, Noah Pestana, Skylar Deckoff-Jones, Jiajiu Zheng, Jordan Goldstein, Andrew Netherton, Ren-Jye Shiue, Michael R. Watts, and Christopher V. Poulton

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Abstract

We demonstrate passive integrated athermal (de)multiplexers showing near 0 pm/°C wavelength shift from 20 to 80 °C on 300 mm silicon photonics wafers. Waferscale data shows its high fabrication tolerance for next-generation optical transceiver systems.

© 2023 The Author(s)

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