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Conferences > OFS > 2023 > W4 > W4.59

Performance of Hydrogen Sensors Based on Pd/Hf Composite Film and π-phase-shift Grating

Fan Zhang, Wenxin Ao, Wenbin Hu, Bingyang Xue, Fabian Buchfellner, Qiang Bian, Johannes Roths, and Minghong Yang

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Abstract

Hydrogen sensors with Pd/Hf film on π-phase-shift grating were proposed. The performance experiments showed that the wavelength shift under 1% hydrogen concentration was 30 and 79 pm for 200 and 500 nm coating thickness, respectively.

© 2023 The Author(s)

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