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Moire Deflectometry Utilizing "ZYGO" Automatic Pattern Processor System

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Abstract

Moire deflectometry1,2 provides a viable alternative to interferometry for the measurement of ray deflections from a phase object. Being an incoherent technique it is free from stability problems associated with interferometry. Among the other advantages is the simplicity of the setup and use of low quality optics.

© 1986 Optical Society of America

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