Some Comparisons of Non Contact Surface Profiling Instruments

Norman J. Brown; William K. Eickelberg

doi:10.1364/OFT.1988.ThA1

Optical Fabrication and Testing
Technical Digest Series (Optica Publishing Group, 1988),
paper ThA1
•https://doi.org/10.1364/OFT.1988.ThA1

Some Comparisons of Non Contact Surface Profiling Instruments

Norman J. Brown and William K. Eickelberg

Optical Fabrication and Testing 1988

Santa Clara, California United States
2–4 November 1988
ISBN:

From the session
Measurement of Low Scatter Surfaces (ThA)

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N. J. Brown and W. K. Eickelberg, "Some Comparisons of Non Contact Surface Profiling Instruments," in Optical Fabrication and Testing, Technical Digest Series (Optica Publishing Group, 1988), paper ThA1.

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Abstract

The LLNL, Zygo (mod 5500), WYKO (Topo - 2 D, Topo - 3 D), and Photographic Sciences (MP-2000), non contact optical profilers were compared and found consistent within their common band limits.

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