Abstract

Many systems have been devised to characterize smooth surfaces. Some systems measure the optical scatter characteristics of surfaces to provide information concerning surface microstructure; examples include the angle-resolved scatter apparatus (scatterometer) and the total integrated scatter (TIS) apparatus. Other instruments measure the surface profile more directly; examples include the mechanical profilometer (e.g. Talystep and Dektak) and the optical profilometer (e.g. WYKO). The optical profilometer measures the optical phase of a surface to derive a surface profile. If the sample is coated with optically transmitting films, the "surface" is not well defined optically. For these samples, strictly speaking, none of the optical techniques should be used to determine surface microstructure.

© 1988 Optical Society of America