Systematic Error Sources and Absolute Calibration on Digital Wavefront Measuring Interferometer

Zhu Yucong; Yang Guoguang; Dong Taihuo

doi:10.1364/OFT.1988.ThB2

Optical Fabrication and Testing
Technical Digest Series (Optica Publishing Group, 1988),
paper ThB2
•https://doi.org/10.1364/OFT.1988.ThB2

Systematic Error Sources and Absolute Calibration on Digital Wavefront Measuring Interferometer

Zhu Yucong, Yang Guoguang, and Dong Taihuo

Optical Fabrication and Testing 1988

Santa Clara, California United States
2–4 November 1988
ISBN:

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Interferometry and Optical Metrology (ThB)

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Z. Yucong, Y. Guoguang, and D. Taihuo, "Systematic Error Sources and Absolute Calibration on Digital Wavefront Measuring Interferometer," in Optical Fabrication and Testing, Technical Digest Series (Optica Publishing Group, 1988), paper ThB2.

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Abstract

A novel digital wavefront measuring interferomater has been developed in our group. TV camera and microcomputer are used to measure the intensities in the interference pattern and synchrously detect the phases by Fourier series method.

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