Angstrom-level Calibration of Eight Inch Flats using a Scanning Fizeau Interferometer

A. Anderson; L. D. La Fleur; M. Kasserls; D. A. Zweig

doi:10.1364/OFT.1992.ThB3

Optical Fabrication and Testing Workshop
Technical Digest Series (Optica Publishing Group, 1992),
paper ThB3
•https://doi.org/10.1364/OFT.1992.ThB3

Angstrom-level Calibration of Eight Inch Flats using a Scanning Fizeau Interferometer

A. Anderson, L. D. La Fleur, M. Kasserls, and D. A. Zweig

Optical Fabrication and Testing 1992

Boston, Massachusetts United States
17–19 November 1992
ISBN:

From the session
X-Ray Optics (ThB)

Open Access

Get PDF
Email
Share
Get Citation
Copy Citation Text
A. Anderson, L. D. La Fleur, M. Kasserls, and D. A. Zweig, "Angstrom-level Calibration of Eight Inch Flats using a Scanning Fizeau Interferometer," in Optical Fabrication and Testing Workshop, Technical Digest Series (Optica Publishing Group, 1992), paper ThB3.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

A scanning Fizeau interferometer is used to measure a set of eight inch reference flats. The uncertainty in the measured figure is less that 2 Årms.

PDF Article

More Like This

Absolute calibration of optical flats using a commercial phase measuring interferometer

Christopher J. Evans, W. Tyler Estler, and Robert E. Parks
WA3 Optical Fabrication and Testing (OF&T) 1992

Flatness Intercomparison Measurements Made on an Optical Flat

Albert F. Slomba, C. Gregory Hull-Allen, Peter Z. Takacs, Christopher J. Evans, and Jean M. Bennett
WA1 Optical Fabrication and Testing (OF&T) 1992

Influence of field of view on the performance of Fizeau interferometers

M. Greenebaum, T. Shultz, D. Brenner, and M. Elbaum
FLL5 OSA Annual Meeting (FIO) 1992

Previous Article Next Article