Absolute calibration of optical flats using a commercial phase measuring interferometer

Christopher J. Evans; W. Tyler Estler; Robert E. Parks

doi:10.1364/OFT.1992.WA3

Optical Fabrication and Testing Workshop
Technical Digest Series (Optica Publishing Group, 1992),
paper WA3
•https://doi.org/10.1364/OFT.1992.WA3

Absolute calibration of optical flats using a commercial phase measuring interferometer

Christopher J. Evans, W. Tyler Estler, and Robert E. Parks

Optical Fabrication and Testing 1992

Boston, Massachusetts United States
17–19 November 1992
ISBN:

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Metrology (WA)

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C. J. Evans, W. T. Estler, and R. E. Parks, "Absolute calibration of optical flats using a commercial phase measuring interferometer," in Optical Fabrication and Testing Workshop, Technical Digest Series (Optica Publishing Group, 1992), paper WA3.

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Abstract

So called "absolute" calibration of optical flats can be performed using a range of algorithms, each with its own limitations. At NIST we have implemented, and are intercomparing, several techniques.

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