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Polished Substrate Surface and Cleaning Study for Coated Optic Quality*

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The optical substrate-coating interface is established by (1) the original polished condition of the substrate; (2) the substrate cleaning process; and (3) the environment of the coating process. The substrate-coating interface affects the coating adhesion properties, is where most coating defects and scatter sites are thought to initiate, and in some instances may control the structure of the coating as it is deposited. Often features appear on an optic after coating which could not be observed after cleaning and prior to coating. Because of the wide variety of possible substrate materials, surface problems, and contaminants, cleaning processes are constantly evolving. Our study has clearly shown that the coating appearance is dependent not only on the cleaning method, but especially on the initial character of the substrate surface.

© 1992 Optical Society of America

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