Polishing Studies to Achieve Supersmooth Finishes on Convex Single Crystal Silicon Optical Components

Gunnar Gunnarsson; Royce L. Platt

doi:10.1364/OFT.1994.OTuA2

Optical Fabrication and Testing Workshop
Technical Digest Series (Optica Publishing Group, 1994),
paper OTuA2
•https://doi.org/10.1364/OFT.1994.OTuA2

Polishing Studies to Achieve Supersmooth Finishes on Convex Single Crystal Silicon Optical Components

Gunnar Gunnarsson and Royce L. Platt

Optical Fabrication and Testing 1994

Rochester, New York United States
6–9 June 1994
ISBN:

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Finishing Technology (OTuA)

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G. Gunnarsson and R. L. Platt, "Polishing Studies to Achieve Supersmooth Finishes on Convex Single Crystal Silicon Optical Components," in Optical Fabrication and Testing Workshop, Technical Digest Series (Optica Publishing Group, 1994), paper OTuA2.

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Abstract

The ability to grow large single crystal silicon substrates and their potential applications in high energy laser systems has provided the need for application of advanced fabrication capabilities to this material. Diamond turning, diamond grinding and other non-conventional fabrication methods for piano and aspheric optics are candidates for processing single crystal silicon. Diamond turning of such materials^1,2 are providing an economical means of producing these optics.

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