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Surface Figure Metrology during highly Automated Fabrication of Microoptics

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Optics fabrication has many common aspects independent from size and shape, but some aspects of microoptics are special. Microoptics means : ☺ small dimensions ☺ little removed material ☺ fast grinding ☺ fast polishing ☺ low weight ☺ difficult to test These properties call for automation of the production process.

© 1994 Optical Society of America

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