Surface Figure Metrology during highly Automated Fabrication of Microoptics

Hans-Jörg Heimbeck

doi:10.1364/OFT.1994.OWB5

Optical Fabrication and Testing Workshop
Technical Digest Series (Optica Publishing Group, 1994),
paper OWB5
•https://doi.org/10.1364/OFT.1994.OWB5

Surface Figure Metrology during highly Automated Fabrication of Microoptics

Hans-Jörg Heimbeck

Optical Fabrication and Testing 1994

Rochester, New York United States
6–9 June 1994
ISBN:

From the session
Interferometry (OWB)

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H. Heimbeck, "Surface Figure Metrology during highly Automated Fabrication of Microoptics," in Optical Fabrication and Testing Workshop, Technical Digest Series (Optica Publishing Group, 1994), paper OWB5.

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Abstract

Optics fabrication has many common aspects independent from size and shape, but some aspects of microoptics are special. Microoptics means : ☺ small dimensions ☺ little removed material ☺ fast grinding ☺ fast polishing ☺ low weight ☺ difficult to test These properties call for automation of the production process.

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