Abstract

The objective of this study is to find an analytical means of calculating the measurement error in phase-shifting interferometry¹ (PSI) due to mechanical vibration. The mathematical approach is inspired by linear systems theory and Fourier methods recently developed by Freischlad and Koliopolous² and by Larkin and Oreb.³ The sensitivity of the interferometer to vibration is reduced to a phase-error transfer function, which includes such factors as the data sampling characteristics of the PSI algorithm, the video camera frame rate and integration time.

© 1994 Optical Society of America