Some new error-compensating algorithms for phase-shifting interferometry

Joanna Schmit; Katherine Creath

doi:10.1364/OFT.1994.PD4

Optical Fabrication and Testing Workshop
Technical Digest Series (Optica Publishing Group, 1994),
paper PD4
•https://doi.org/10.1364/OFT.1994.PD4

Some new error-compensating algorithms for phase-shifting interferometry

Joanna Schmit and Katherine Creath

Optical Fabrication and Testing 1994

Rochester, New York United States
6–9 June 1994
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J. Schmit and K. Creath, "Some new error-compensating algorithms for phase-shifting interferometry," in Optical Fabrication and Testing Workshop, Technical Digest Series (Optica Publishing Group, 1994), paper PD4.

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Abstract

5- and 6-frame algorithms derived using an extended averaging technique have significantly less sensitivity to phase shift miscalibration and detector nonlinearities than commonly-used algorithms.

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