Stylus Profilometer with an Optical Reference

Stephan R. Clark; Michael North-Morris; John E. Greivenkamp

doi:10.1364/OFT.1998.OWB.2

Optical Fabrication and Testing
Technical Digest Series (Optica Publishing Group, 1998),
paper OWB.2
•https://doi.org/10.1364/OFT.1998.OWB.2

Stylus Profilometer with an Optical Reference

Stephan R. Clark, Michael North-Morris, and John E. Greivenkamp

Optical Fabrication and Testing 1998

Kailua-Kona, Hawaii United States
8–10 June 1998
ISBN:

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New Approaches to Optical Shop Testing (OWB)

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S. R. Clark, M. North-Morris, and J. E. Greivenkamp, "Stylus Profilometer with an Optical Reference," in Optical Fabrication and Testing, Technical Digest Series (Optica Publishing Group, 1998), paper OWB.2.

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Abstract

Three-dimensional or x-y-z stylus profilometers are a well-established method for measuring non-rotationally symmetric aspheric surfaces.¹ In this paper, the design of a three-dimensional stylus profilometer that uses an optical reference surface is presented. The benefits of using this reference structure are also discussed.

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