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Conferences > OFT > 1998 > OWB > OWB.1

Absolute sphericity measurement: a comparative study on the use of interferometry and a Shack-Hartmann-sensor

J. Pfund, N. Lindlein, J. Schwider, R. Burow, K.-E. Elßner, and Th. Blümel

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Abstract

High precision measurements in surface interferometry make absolute calibration methods necessary. Especially, spherical surfaces being the boundary of glass lenses have to be tested to the highest possible precision and, furthermore, it should be possible to test whole objectives at the working wavelength.

© 1998 Optical Society of America

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