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Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OTuA1
  • https://doi.org/10.1364/OFT.2004.OTuA1

Glass material response to the fabrication process: Example from lapping

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We use three glass material micromechanical properties (Young s modulus E, hardness H, and fracture toughness Kc) to describe the glass response to the lapping fabrication process. We discuss loose abrasive lapping of 11 commercially available Ohara glasses with the material removal rate varying by a factor of more than 7, and each micromechanical property by more than a factor of 2. We demonstrate that lapping material removal rate may be predicted based on a microindentation model.

© 2004 Optical Society of America

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