Abstract

Fabrication of Kirkpatrick-Baez (KB) mirrors is challenging due to the aspherical departure of the mirror surfaces from base geometries combined with the high-quality requirements on both slope and height. In this study, we demonstrate the entire procedure of manufacturing an elliptical cylinder KB mirror using our in-house developed Ion Beam Figuring (IBF) and metrology technologies at the National Synchrotron Light Source II (NSLS-II). The result confirms that the mirror has achieved 0 .15 µ rad root mean square (RMS) and 0.36 nm RMS residual slope and height errors, respectively, with 0.3 nm RMS micro roughness.

© 2023 The Author(s)