Abstract

This paper reviews various methods of application of ion beam sources for the production of low-loss laser coatings. Ion beams can be used to sputter a target material to be deposited on a substrate and the beams can be directed to the deposited films to change their chemical and physical properties. Four deposition methods were compared:

- Electron beam deposition - Ion assisted deposition -

- Ion beam sputtering - Dual beam deposition -

In the production of high quality laser coatings it is extremely important to prevent the decomposition of evaporation materials. These coatings should be deposited stoi-chiometrically as traces of metals or metal suboxides cause absorption losses. Especially coatings for laser applications should have no ansorption losses. Losses reduce the reflectivity and lower the damage threshold for high power radiation.

© 1984 Optical Society of America