Experimental Study of Substrate Temperature

Yi-hsun Yen; Jian-xin Shao; Pei-zhong Xu

doi:10.1364/OIC.1988.ThD5

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1988),
paper ThD5
•https://doi.org/10.1364/OIC.1988.ThD5

Experimental Study of Substrate Temperature

Yi-hsun Yen, Jian-xin Shao, and Pei-zhong Xu

Optical Interference Coatings 1988

Tucson, Arizona United States
12–15 April 1988
ISBN:

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Deposition Techniques: 2 (ThD)

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Y. Yen, J. Shao, and P. Xu, "Experimental Study of Substrate Temperature," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1988), paper ThD5.

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Abstract

Substrate temperature is one of the most important processing parameters for optical coating deposition, especially in infrared range in which most of high refractive index coating materials are narrow gap semiconductors. The properties of the coatings deposited with these materials are strongly dependent on the substrate temperature.[1]

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