Layer Uniformity Obtained by Vacuum Evaporation. Application to Fabry-Perot Filters

C. Grèzes-Besset; R. Richier; E. Pelletier

doi:10.1364/OIC.1988.ThE1

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1988),
paper ThE1
•https://doi.org/10.1364/OIC.1988.ThE1

Layer Uniformity Obtained by Vacuum Evaporation. Application to Fabry-Perot Filters

C. Grèzes-Besset, R. Richier, and E. Pelletier

Optical Interference Coatings 1988

Tucson, Arizona United States
12–15 April 1988
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C. Grèzes-Besset, R. Richier, and E. Pelletier, "Layer Uniformity Obtained by Vacuum Evaporation. Application to Fabry-Perot Filters," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1988), paper ThE1.

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Abstract

We show how we can measure with accuracy the uniformity of layer thickness for different materials obtained by vacuum deposition. Generalization to multilayer stacks raises many difficulties due to time dependence of evaporant distribution.

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