Thickness Distribution of Evaporated Films

Anthony Musset; Ian Stevenson

doi:10.1364/OIC.1988.ThE3

Optical Interference Coatings
Technical Digest Series (Optica Publishing Group, 1988),
paper ThE3
•https://doi.org/10.1364/OIC.1988.ThE3

Thickness Distribution of Evaporated Films

Anthony Musset and Ian Stevenson

Optical Interference Coatings 1988

Tucson, Arizona United States
12–15 April 1988
ISBN:

From the session
Uniformity (ThE)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
A. Musset and I. Stevenson, "Thickness Distribution of Evaporated Films," in Optical Interference Coatings, Technical Digest Series (Optica Publishing Group, 1988), paper ThE3.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

In order to set up a vacuum chamber for coating a number of large parts, or perhaps a large number of small parts, it is of importance to know the emission characteristics (source function) of the evaporation source.

PDF Article

More Like This

Stoichiometry of Reactively Evaporated Films

Albert Feldman, E. N. Farabaugh, and Y. N. Sun
TuA4 Optical Interference Coatings (OIC) 1988

Large Area Coatings with Uniform Thickness Fabricated in a Small Vacuum Chamber

C. J. Hayden and E. Spiller
ThE2 Optical Interference Coatings (OIC) 1988

Polymer film production by pulsed laser evaporation

STEVEN G. HANSEN and THOMAS E. ROBITAILLE
THE3 Conference on Lasers and Electro-Optics (CLEO:S&I) 1988

Previous Article Next Article